介绍了纳米分辨近场光学显微成象技术现状.近场光学显微成象技术大体可分为小孔扫描近场光学显微镜(A-SNOM)、无孔径尖散射扫描近场光学显微镜(S-SNOM)和光子扫描隧道显微镜(PSTM)三种基本类型.除介绍这三类近场光学显微镜简要成象原理、现状和各自特点外,还重点介绍了大连理工大学纳米成象技术研究组PSTM的研究进展,即PSTM消假象数值模拟和实验研究结果,其实验空间分辨首次达到2.8nm线扩展函数半高宽的水平.

The present situation of Near-field Optical Microscopy (NFOM) is introduced. There are three main kinds in NFOM: a small aperture scanning near-field optical microscope(A-SNOM), apertures tip scattering scanning near-field optical microscope (S-SNOM) and photon scanning tunneling microscope (PSTM). According to the beam transmitted or reflected from sample, A-SNOM and S-SNOM are classified into A-SNOM(T) or A-SNOM(R), and S-SNOM(T) or S-SNOM(R) except PSTM (only Transmitted). The simple imaging principles and specialities of them are presented and compared. The progress of PSTM in our research group are presented. The simulation and experimentation of the false image eliminated PSTM are completed. The FWHM of the line-spread function of 2.8nm in our experiment have been obtained at the first. The keys of super-resolution of NFOM are concluded at last.